To run the model, open magnetometer.pro with Gmsh.
This is a 3D, multiphysics model of a MEMS magnetometer, coupling
electromagnetic (electrokinetic), mechanichal (elastic) and thermal models. To
run the model, open magnetometer.pro with Gmsh.
When an alternating current flows through it, the magnetometer starts to vibrate
if it is placed in a magnetic field. The amplitude of the vibration can be used
to measure the magnetic field. To increase sensitivity, the frequency of the
current is tuned to excite a resonant mode of the xylophone-type
structure. Several analyses are predefined: uncoupled modal analysis of the
structure (Eigenmodes) and calculation of the current flow
(Electrokinetics), static and dynamic electro-mechanical analysis
(Electro-mechanical), and coupled electro-thermal analysis